PRODUCTION OF DEPOSITED THIN FILM,申请号JP19920227277-传众专利搜索

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发明名称	PRODUCTION OF DEPOSITED THIN FILM
摘要
申请公布号	JPH06122598(A)	申请公布日期	1994.05.06
申请号	JP19920227277	申请日期	1992.08.26
申请人	MITSUBISHI KASEI CORP	发明人	WATABE YUKIO
分类号	C01G1/00;C30B23/08;C30B25/06;C30B29/22;H01B13/00;H01L39/24;(IPC1-7):C30B29/22	主分类号	C01G1/00
代理机构		代理人
主权项
地址

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