| 摘要 |
PURPOSE:To obtain a small, lightweight electroacoustic integrated circuit of high performance by sticking an electroacoustic element using a single-crystal substrate of lithium niobate or lithium tantalate having excellent electroacoustic characteristics to an Si substrate with such electronic elements as a transistor, etc., directly or with a silicon nitride film in between. CONSTITUTION:A surface acoustic wave resonator 2 composed of a single-crystal substrate of lithium niobate or lithium tantalate is directly stuck to an Si substrate 1 by hydrophilic treatment and superposition heat treatment. In addition, 5, such as a transistor 3, variable-capacitance diode chip 4, passive chip parts 5 such as capacitor, inductor and resistor, and the electrodes 6 and 7 of the resonator 2 are formed on the substrate 1. When the capacitance of the diode 4 is changed by changing the voltage applied across the chip 4, the oscillation frequency of the resonator 2 can be changed. Therefore, a very small voltage- controlled oscillator can be obtained when the integrally formed resonator and parts are housed in a sealed container. |
