| 摘要 |
PURPOSE:To downsize an oligner and to cause a plurality of aligness to have a mask for common use. CONSTITUTION:A mask library 6, mask conveyor 7 and mask defect inspector 9 are provided in a conveying car separate from an aligner 10 and positioned relative to each of a plurality of aligner to deliver a necessary mask. Immediately before the delivery of the mask, the defect of the mask is inspected; and at the time of the delivery, the vibrational state of the delivery apparatus 14 of the aligner is detected so that the conveying car is vibrated simultaneously with the vibration. |
