PROBE EQUIPMENT AND PROBING METHOD,申请号JP19920300323-传众专利搜索

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发明名称	PROBE EQUIPMENT AND PROBING METHOD
摘要
申请公布号	JPH06124985(A)	申请公布日期	1994.05.06
申请号	JP19920300323	申请日期	1992.10.13
申请人	TOKYO ELECTRON YAMANASHI KK	发明人	YAMASHITA SATORU
分类号	G01R1/073;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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