HIGH-TEMPERATURE VACUUM HEATING FURNACE AND ITS COOLING METHOD,申请号JP19910044353-传众专利搜索

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发明名称	HIGH-TEMPERATURE VACUUM HEATING FURNACE AND ITS COOLING METHOD
摘要
申请公布号	JPH06124955(A)	申请公布日期	1994.05.06
申请号	JP19910044353	申请日期	1991.02.16
申请人	SUKEGAWA ELECTRIC CO LTD	发明人	HOSHI TAKAO;ABE YUJI
分类号	H01L21/324;C21D1/773;F27B17/00;(IPC1-7):H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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