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发明名称
ETCHING DEVICE
摘要
申请公布号
JPH06124917(A)
申请公布日期
1994.05.06
申请号
JP19920273094
申请日期
1992.10.12
申请人
TOSHIBA CORP
发明人
NIIMURA TADASHI;SAITO SHUICHI;NISHIMURA HIROSHI;MINAMIYAMA TAKAYUKI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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