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发明名称
PROCESSING OF SEMICONDUCTOR SUBSTRATE, FORMATION OF DIFFRACTION GRATING AND MANUFACTURE OF OPTICAL SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06124937(A)
申请公布日期
1994.05.06
申请号
JP19920298138
申请日期
1992.10.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKAHASHI SHOGO
分类号
H01L21/306;H01L21/308;H01S5/00;(IPC1-7):H01L21/306;H01S3/18
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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