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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE AND SUBSTRATE CLEANER USED THEREFOR
摘要
申请公布号
JPH06124887(A)
申请公布日期
1994.05.06
申请号
JP19910276506
申请日期
1991.09.27
申请人
SONY CORP
发明人
IKEDA RIKIO
分类号
G03F7/16;H01L21/027;H01L21/304;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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