| 摘要 |
<p>PURPOSE:To provide a moving device capable of improving response characteristic for a small displacement and simultaneously constituting a compact small displacement mechanism and its producing method and positioning device and a table device using them. CONSTITUTION:A table device is constituted of a moving device 2 of which fixed part 15 for holding a substrate holder 3 via a support mechanism 11 provided for elastically holding a substrate holder 3 holding a substrate 5 in the state free of displacement, is formed into one body with a single member, and positioning devices 4a, 4b provided for slightly displacing the sample holder 3 in the direction of the light axis 9 of an optical system 10.</p> |
