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发明名称
ULTRASONIC CLEANER
摘要
申请公布号
JPH06124935(A)
申请公布日期
1994.05.06
申请号
JP19920274189
申请日期
1992.10.13
申请人
TOSHIBA CORP
发明人
SAKURAI NAOAKI
分类号
B01J19/10;B06B1/02;B08B3/12;H01L21/304;(IPC1-7):H01L21/304
主分类号
B01J19/10
代理机构
代理人
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