| 摘要 |
The X-ray mask copying system uses two mask holders (1..3; 4..6) and a heat sink (12) for the obtained mask copy, with accurate alignment and spacing of the master mask and the copy via a sliding, autocollimation telescope (18). The exact spacing of the heat sink and the copy is provided by at least one capacitive spacing sensor (13). Pref. each mask holder has a metal holding plate (3, 6), an attached carrier plate (2, 5) and a reception device (1, 4) for the carrier plate, allowing adjustment of the latter via coordinate setting screws (11). ADVANTAGE - Increased alignment and spacing precision of lithography components.
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| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE |
发明人 |
GRIMM, JUERGEN, DR., 1000 BERLIN, DE;CHLEBEK, JUERGEN, DR., 1000 BERLIN, DE;LOECHEL, BERND, DR., 1000 BERLIN, DE;ENGLER, KLAUS-DIETER, 1000 BERLIN, DE |
