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发明名称
Verfahren zur Züchtung eines Halbleiterkristalles aus III-V-Gruppen-Verbindung auf einem Si-Substrat.
摘要
申请公布号
DE3884682(T2)
申请公布日期
1994.05.05
申请号
DE19883884682T
申请日期
1988.06.30
申请人
NEC CORP., TOKIO/TOKYO, JP
发明人
MATSUMOTO, TAKASHI, MINATO-KU TOKYO, JP
分类号
C30B25/02;(IPC1-7):C30B25/02;C30B29/40;H01L21/20
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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