| 申请人 |
EBARA CORP., TOKIO/TOKYO, JP;JAPAN AS REPRESENTED BY DIRECTOR GENERAL OF AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY, TOKIO/TOKYO, JP |
发明人 |
YABE, AKIRA, AGENCY OF IND. SCIENCE AND TECHNOLOGY, TSUKUBA-SHI, IBARAKI 305, JP;NIINO, HIROYUKI, AG.OF IND. SCIENCE AND TECHNOLOGY, TSUKUBA-SHI, IBARAKI 305, JP;SHIMOYAMA, MASASHI, C/O EBARA CORPORATION, TOKYO 144, JP |
