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发明名称
High Impedance Plasma Ion Implantation Method and Apparatus
摘要
申请公布号
CA2102384(A1)
申请公布日期
1994.05.05
申请号
CA19932102384
申请日期
1993.11.03
申请人
HUGHES AIRCRAFT COMPANY
发明人
SCHUMACHER, ROBERT W.;MATOSSIAN, JESSE N.;GOEBEL, DAN M.
分类号
C23C14/48;H01J37/317;H01J37/32;H01L21/265;H01L21/324;(IPC1-7):H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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