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发明名称
Verfahren zur Dosis-Sofortkontrolle
摘要
申请公布号
DD301837(A9)
申请公布日期
1994.05.05
申请号
DD19890333174
申请日期
1989.10.02
申请人
HALBLEITERWERK GMBH
发明人
NEUMANN, CLAUDIA, DIPL.-PHYS.;BOLZE, KLAUS-DETLEF DR.-ING.
分类号
H01L21/265;H01L21/66;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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