发明名称 Method and apparatus for detecting wire bond pull test failure modes.
摘要 Provided is a method and apparatus for electrically detecting the location of bond failure and wire breakage occurring during tensile strength testing of a wire sample (14) having first and second bond foots (16,18) affixed to respective first and second support pads (20,22). The method and apparatus monitors the voltage levels of first and second electrically conductive probes (28,34). The first probe (28) has a primary lead (24) in electrical contact with the first support pad (20) and a secondary lead (26) in electrical contact with the first bond foot (16). Similarly, the second electrically conductive probe (34) has a primary lead (30) in electrical contact with the second support pad (22) and a secondary lead (32) in electrical contact with the second bond foot (18). Voltage detection means is provided in electrical contact with the first and second probes (28,34) for detecting the voltage level at each of the respective (58,60,62,64) primary and secondary leads to generate the respective corresponding output signals. Comparator means is further provided in electrical contact with the voltage detection means for receiving and comparing each of the output signals to a selected reference value and generating a supplemental output signal indicating the location of bond failure or wire breakage.
申请公布号 EP0595652(A1) 申请公布日期 1994.05.04
申请号 EP19930308666 申请日期 1993.10.29
申请人 FORD MOTOR COMPANY 发明人 PHAM, CUONG VAN;HAYDEN, BRIAN J.
分类号 G01N3/00;G01N3/06;G01N19/04;H01L21/66 主分类号 G01N3/00
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