Micro-structuring of workpieces by cluster ions - using beam shields and apertures

摘要

The method for micro-structuring of given regions of a workpiece by a beam of cluster ions with chosen energy and chosen ratio of neutral particles to the charge of cluster ions is based on material removal by the beam action. It is characterised by the following facts: (a) micro-structures are introduced into the workpiece (2), which consists of a very brittle and hard material, or are separated from it by at least one radiation operation with the use of a directed beam (1) of cluster ions provided with a predetermined shield (3); and (b) by means of further shields and/or apertures and successive radiation operations, which take place at reduced material removal rate, the micro-structures are brought to their final dimensions and surface quality. Micro-structuring is carried out with the use of a beam of cluster ions produced by condensation of gases. Fixed and/or moving (rotating) shields and apertures are used to produce required micro-structures. USE/ADVANTAGE - For micro-structuring of workpieces made of metallic and non-metallic materials. Surfaces of very brittle and hard materials (cobalt-samarium, tungsten, diamond etc.) can be provided with micro-structures through material removal.