发明名称 Ultrasonic actuator.
摘要 The ultrasonic actuator of the present invention includes a rod shaped vibration body having a plurality of faces, an exciter which is provided on a one of the faces for vibration excitation of the vibration body and which generates traveling waves which progress along this face for vibration excitation, and a movable member which is pressed against the vibration body and is moved by the traveling waves. The vibration body is so formed that the traveling waves which progress along the face for vibration excitation of the vibration body are transmitted to a face of the vibration body other than its face for vibration excitation, and are recirculated back to the face for vibration excitation again. <IMAGE>
申请公布号 EP0595426(A1) 申请公布日期 1994.05.04
申请号 EP19930203019 申请日期 1993.10.27
申请人 NIKON CORPORATION 发明人 TAKAGI, TADAO
分类号 H02N2/00;H01L41/09;H02N2/08 主分类号 H02N2/00
代理机构 代理人
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