发明名称 |
Single crystal pulling apparatus having slidable shield plate to control area of opening around single crystal. |
摘要 |
<p>A plurality of shield blades (21) for defining an opening (25) surrounding a single crystal (15) are provided between a melt (14) received in a crucible (10) and a screen (30). The shield blades (21) are carried by operation rods (23) so as to make the gap between the inner edges of the shield blades (23) and the surface of the single crystal (15) constant. Since crystal growth continues under the same condition from the beginning to the end, an obtained single crystal (15) is free from defects such as dislocations and excellent in homogenieity. <IMAGE></p> |
申请公布号 |
EP0595269(A1) |
申请公布日期 |
1994.05.04 |
申请号 |
EP19930117353 |
申请日期 |
1993.10.26 |
申请人 |
RESEARCH DEVELOPMENT CORPORATION OF JAPAN;SHIRAISHI, YUTAKA;TERASHIMA, KAZUTAKA |
发明人 |
SHIRAISHI, YUTAKA;TERASHIMA, KAZUTAKA |
分类号 |
C30B15/22;C30B15/00;C30B15/14;(IPC1-7):C30B15/00 |
主分类号 |
C30B15/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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