发明名称 |
Dust-proof film. |
摘要 |
A dust-proof film comprising a mask and a pellicle film spaced apart therefrom by a pellicle frame such as to prevent a foreign substance from contacting the mask wherein a paint layer is provided on the inner surface of the pellicle frame between the mask and the pellicle film, or wherein the pellicle frame is attached to the mask by a tape comprising a foamed substrate and an adhesive layer provided on each surface thereof, the inner surface of the foamed substrate having a paint layer provided thereon, or wherein the pellicle frame is attached to the mask by a tape comprising an unfoamed substrate and an adhesive layer provided on each surface thereof, or wherein the pellicle film is attached to the mask by a tackifier, such as to prevent a foreign substance from contacting the mask. |
申请公布号 |
EP0304211(B1) |
申请公布日期 |
1994.05.04 |
申请号 |
EP19880307332 |
申请日期 |
1988.08.08 |
申请人 |
MITSUI PETROCHEMICAL INDUSTRIES, LTD.;HITACHI, LTD. |
发明人 |
NAKAGAWA, KIROAKI;TAKEHANA, YOICHI |
分类号 |
H01L21/30;G03F1/00;G03F1/62;H01L21/027 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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