Transportation device having an air-foil bearing

摘要

A transportation device for transporting an object comprises a base body, a depression provided on a top surface of the base body, a lifting mechanism provided on the base body in correspondence to the depression and including a lift plate for supporting the object thereon and an air envelope unit supplied with compressed air for causing a dilatation in response thereto, the lift plate being connected to the air envelope unit such that the lift plate is lifted upward upon a supply of the compressed air, and an air foil bearing provided on the base body such that a top surface of the air foil bearing is located at a level above a bottom surface of the base body.