发明名称 |
Interface apparatus for transporting substrates between substrate processing apparatus |
摘要 |
An interface apparatus for transferring substrates between processing apparatus which provide various treatments for the substrates. The interface apparatus includes a transfer mechanism which, during a normal operation, receives substrates from an upstream processing apparatus and delivers the substrates to a downstream processing apparatus. Upon occurrence of a trouble in the downstream processing apparatus, the substrates transported from the upstream processing apparatus to the transfer mechanism are deposited in a substrate storage by a depositing and fetching mechanism. After the trouble is eliminated, the transfer mechanism delivers the substrates taken out of the storage to the downstream processing apparatus.
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申请公布号 |
US5308210(A) |
申请公布日期 |
1994.05.03 |
申请号 |
US19930080652 |
申请日期 |
1993.06.22 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
OHTANI, MASAMI;OKA, YOSHIJI;OKAMOTO, TAKEO;FUKUTOMI, YOSHITERU |
分类号 |
B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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