| 摘要 |
PURPOSE:To perform the recognition of component and recognition of substrate pattern by the same image pick-up means. CONSTITUTION:A component attaching part 3 which moves in X-Y directions is provided with a component attaching head 31 and an image pick-up means 38 arranged with their top parts facing downward. In a space where a sucking nozzle 32 moves up and down, a 45 deg. mirror 34 is provided. Which gets in and out in parallel direction to its reflecting plane of 45 deg. and reflects the image of a component A attracted by the sucking nozzle in horizontal direction when it gets in. Around this up-down movement space, a permeating illumination part 33 is arranged, which illuminates the attracted component from its backside. Under an image pick-up means, a 45 deg. half mirror 36 is arranged, which reflects the image of the component coming from horizontal direction upward and has a pattern image permeate upward. Behind the 45 deg. half mirror, a reflecting illumination part 37 is arranged facing the direction that the component image comes from. The reflecting illumination part is lighted when the image of the substrate pattern is picked up, a part of the illumination light illuminates the surface of substrate. When the image of the component is picked up, the reflecting illumination part is put out, while the permeating illumination part is lighted to pick up the component image and the substrate pattern image alternately. |
