Chamber for transporting components under vacuum - with a second transport mechanism with elements movable axially and radially relative to the rotary first transport mechanism.

摘要

The chamber (3) for at least transporting components, esp disc-shaped components, and at least for a time in vacuum, in the course of their mfr has at least two external openings and a transport mechanism which is rotatable about an axis (A43) to reach these openings. There is a transport mechanism (7) with at least one element linearly displaceable parallel to the axis (A43) and with an element radially displaceable relative to this axis, allowing components to be transported both axially and radially. The chamber (3) is combined via a joint opening with a transport chamber (1) housing the transport device (7). At least one of the openings of the first chamber (3) serves as an airlock which is closable, preferably vacuum-tight, by an external lid and a disc on an arm of the rotary transport mechanism in this chamber. USE/ADVANTAGE - For conveying (in vacuum) disc-shaped components (eg magnetic and magneto-optical data storage discs). It eliminates drawbacks of known equipment, such as: components can be fed to openings only in an axial direction; limited stroke length of the mechanism; large axial dimension of the chamber.