PROBE UNIT AND METHOD OF MANUFACTURING THE SAME

摘要

A probe unit consisting of a rectangular plate type base (3), and a plurality of extremely thin metal wires (4) used for probe pins partly fixed to the base (3) so that the wires (4) are spaced at regular intervals, the extremely thin metal wires (4) used for probe pins being composed of linear portions (4a) fixed to the base (3), bent portions (4c) extending from the base and on the extensions of the linear portions in the outward direction and bent toward the surface to be inspected of an object, inclined portions (4b) inclined in the outward direction of the base from the bent portions (4c) toward the surface to be inspected of an object, and curved portions (2) extending from the outer ends of the inclined portions (4b) further in the outward direction of the base, the curved portions (2) constituting probe pins (2) to be brought into contact with the surface to be inspected of an object. This probe unit is manufactured by spanning extremely thin metal wires, which are molded out of a metal wire material and used for probe pins, over a specified space in a parent base at predetermined intervals and fixed, and subjecting the resultant wires to bending.