| 摘要 |
PURPOSE: To provide the simple and easy manufacture method of a polarized polymer stripe waveguide by providing a process for manufacturing a polymer waveguide blank, the process for electric field polling the polymer waveguide blank and the process for photoetching the contour of the stripe waveguide inside the waveguide blank. CONSTITUTION: (A) a polymer solution 12 is applied to the surface of a base 14, the solution is solidified, the waveguide or an induction member 16 is formed and the polymer waveguide blank 10 is manufactured. (B) Then, the waveguide blank 10 is heated to humidity slightly higher than the Tg of a waveguide layer polymer in an inactive atmosphere, a potential for crossing a waveguide layer 16 is impressed until the molecules of the waveguide polymer are aligned, it is cooled to be less than the Tg while maintaining an electric field thereafter and the waveguide 16 is electrically polarized. (C) Thereafter, wen the waveguide 16 is irradiated with a UV laser beam 20 through a shadow mask 22, the irradiated part is photoetched and the polarized polymer stripe waveguide 24 is obtained. |
