| 摘要 |
PURPOSE:To provide a method for hardening treatment for a water-soluble photoresist which has no problems in handling property and harmfulness. CONSTITUTION:An aq. soln. consisting essentially of zirconium acetate is used as a hardener in the method for reinforcing the corrosion resistant film of resist patterns by treating the patterns of the water-soluble photoresist consisting essentially of casein with the hardener, then heating the patterns. As a result, the problems in the handling property and harmfulness are eliminated and the hardening treatment to increase an etching factor is executed. In addition, the problems of waste water pollution, etc., by chromium which are heretofore generated with the conventional hardenes are solved. |
