| 摘要 |
<p>PURPOSE:To make it possible to accurately detect anomalies in a laser equipment using a simple constitution by monitoring whether laser light is oscillated or not each time a laser oscillation command is delivered. CONSTITUTION:An oscillation trigger detector 10 detects oscillation trigger signals output from an oscillation trigger within a HV power supply device 6 to a charging circuit 5. It outputs oscillation trigger signal detect signals a to an anomaly judgment device 9 each time it detects the signal. Output laser light is incident on a beam splitter 4, and some of the light, reflected by the splitter 4, is launched into a laser light detector 20. The laser light detector 20 outputs oscillated laser light detect signals b to the anomaly judgment device 9 each time it detects the launched laser light. The laser light detector 20 consists of PiN photodiode, for example, and outputs the detect signal when it is irradiated with laser light having an intensity of a specific value or above. The anomaly judgment device 9 detects anomalies in the equipment based on the result of the comparison of the detect signals a and b.</p> |
