发明名称 MANUFACTURE OF SEMICONDUCTOR
摘要 <p>PURPOSE:To control the whole line, especially the conveyer system of manufacturing equipment by providing host computers that monitor the controllers in stockers for controlling the conveyer system as well as the controllers for a plurality of manufacturing devices. CONSTITUTION:A stocker 200 is provided with an identifier reader 220, which reads identifiers of magazines. An identifier read is sent to host computers 1, 2,..., which in turn perform the lot management of magazines. The host computers are interconnected through communications means to monitor the processing of magazines. Thus, the whole line flows smoothly, and idle time is reduced.</p>
申请公布号 JPH06120265(A) 申请公布日期 1994.04.28
申请号 JP19920263828 申请日期 1992.10.01
申请人 SHARP CORP 发明人 MIYOSHI RYUICHI;HONDA MASAYUKI
分类号 B23Q41/02;B65G43/00;G05B19/418;H01L21/50;(IPC1-7):H01L21/50 主分类号 B23Q41/02
代理机构 代理人
主权项
地址