| 摘要 |
PURPOSE:To keep secondary electron detecting efficiency remaining unchanged, even when a large sample is substantially moved in a scanning electron microscope. CONSTITUTION:Secondary electron detectors 5 and 5' are arranged at both sides of a sample stage 4 in such a way as fixed to a microscope body, and output signals from the detectors 5 and 5' are summed up. Or, the secondary electron detectors 5 and 5' are fixed to the sample stage 4 itself. As a result, the secondary electron detecting efficiency of the detectors 5 and 5' becomes free from a change, regardless of a sample travel. |
