THERMAL OXIDATION METHOD,申请号JP19920271258-传众专利搜索

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发明名称	THERMAL OXIDATION METHOD
摘要
申请公布号	JPH06120188(A)	申请公布日期	1994.04.28
申请号	JP19920271258	申请日期	1992.10.09
申请人	KAWASAKI STEEL CORP	发明人	DENDA AKIRA
分类号	H01L21/302;H01L21/304;H01L21/3065;H01L21/316;(IPC1-7):H01L21/304	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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