| 摘要 |
PURPOSE:To obtain practical X-ray intensity, by constituting a pumping laser equipment so as to output a pumping laser light having a pulse train waveform wherein the pulse width has a specified numerical value, the pulse time interval has a specified numerical value, and the total number of pulses is larger than or equal to a specified numerica value. CONSTITUTION:In a vacuum vessel 1, a silicon substrate 3 is so arranged that the distance from a titanium target 2 to X-ray resist is about 11cm. Laser light 8 is a pumping laser light having a pulse train waveform wherein the width of each pulse is 300ps or smaller, the time interval of pulses is 600ps or shorter, and the total number of pulses is 3 or larger. Thereby X-ray whose intensity is practically sufficient is generated, so that practical X-ray intensity can be obtained by using a small-sized low output pumping laser equipment. |
