| 摘要 |
PURPOSE:To provide a mirror driving device which enables two-shaft driving and position offsetting. CONSTITUTION:Piezoelectric actuators 1-4 which are supported at both lengthwise ends by elastic hinges 5a-8a, and 5b-8b are arranged between a support base 9 fitted with a mirror 10 and a member 11 for fixation. The piezoelectric actuators 1 and 3, and 3 and 4 are arranged in pairs orthogonally to each other. Consequently, the piezoelectric actuators 1 and 2 drive the mirror 10 in an X-axial direction and the piezoelectric actuators 2 and 4 drive the mirror in a Y-axial direction. |
