发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To prevent a faulty write, by reducing the contact resistance between a capacitor lower electrode and an impurity-injected layer. CONSTITUTION:A semiconductor device formed out of, a P-type monocrystal silicon substrate 20 having a principal surface and having an inclined surface 20a in the predetermined part of the principal surface, n<+> impurity-injected layers 21a, 21b formed at a predetermined space on the principal surface of the monocrystal silicon substrate 20 so as to interpose a channel region 3 between them, a gate electrode 6 formed on the channel region 3 via a gate oxide film 5, and a capacitor lower electrode 24 connected electrically with the n<+> impurity-injected layer 21a on the inclined surface 20a of the monocrystal silicon substrate 20.
申请公布号 JPH06120443(A) 申请公布日期 1994.04.28
申请号 JP19920270480 申请日期 1992.10.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 KATAYAMA TOSHIHARU
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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