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发明名称
PARALLEL PLATE PLASMA CVD APPARATUS
摘要
申请公布号
JPH06120147(A)
申请公布日期
1994.04.28
申请号
JP19920294011
申请日期
1992.10.08
申请人
ENYA SYST:KK
发明人
ENOMOTO KEIJI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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