发明名称 A device for applying a lacquer coating to a disc-shaped registration carrier.
摘要 The invention relates to a device for applying a lacquer coating to a disc-shaped registration carrier. The device includes a rotary table, to be rotated about an axis of rotation at different speeds, for supporting the registration carrier, as well as with an arm which is pivotable about a pivot axis. The arm has a lacquer supply nozzle at one end and the arm is pivotable between a first position near the axis of rotation of the rotary table and a second position beside the rotary table. The arm is mounted and arranged to be pivotable about an upwardly sloping pivot axis so that the pivot axis of the arm and the axis of rotation of the rotary table intersect or cross at a pint higher than the rotary table. <IMAGE>
申请公布号 EP0594252(A1) 申请公布日期 1994.04.27
申请号 EP19930202902 申请日期 1993.10.15
申请人 OD & ME B.V. 发明人 DIEPENS, PETRUS JOHANNES
分类号 B05C11/08;G03F7/16;G11B5/84;G11B7/26;H01L21/027;H01L21/30 主分类号 B05C11/08
代理机构 代理人
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