Microwave plasmas producing device.

摘要

In a device for producing a large-volume low-pressure plasma (1), a plasma chamber (K) has a microwave generator (9), an annular hollow-conductor resonator (3) and a coupling (23, 8, 7 and 10) of the microwave generator (9) to the annular hollow-conductor resonator (3). The production of a low-pressure plasma, in particular of large volume, has been made possible by a plurality of coupling slits (4) being arranged in the inner wall (26) of the annular hollow-conductor resonator (3) in such a way that they in each case couple the same amount of microwave power out of the annular hollow-conductor resonator (3).