发明名称 |
Ion implanter with beam resolving apparatus and method for implanting ions |
摘要 |
An ion implantation apparatus including a resolving aperture-shutter assembly (31) placed in the ion beam path (18). The resolving aperture-shutter assembly includes a movable shutter (34) and a shutter housing surrounding the movable shutter (34). Selected ions in an ion beam path (18) pass through a hole (44) in movable shutter (34) when the movable shutter (34) is in a first position, and are blocked by the solid surfaces when the movable shutter (34) is in a second position. The enclosure (32, 33, 39) completely surrounds the movable shutter (34). The enclosure (32, 33, 39) includes a first aperture (42) aligned with the ion beam path (18) for allowing the selected ions to enter the enclosure and a second aperture (41) aligned with the ion beam path (18) for allowing the selected ions to exit the enclosure after passing through the hole (44) in the movable shutter.
|
申请公布号 |
US5306920(A) |
申请公布日期 |
1994.04.26 |
申请号 |
US19920980062 |
申请日期 |
1992.11.23 |
申请人 |
MOTOROLA, INC. |
发明人 |
KING, JERRY S.;D'ACOSTA, CARL E.;JASPER, CRAIG L.;BANKS, DAN A. |
分类号 |
H01J37/05;H01J37/09;(IPC1-7):H01J37/09 |
主分类号 |
H01J37/05 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|