FRONT SURFACE EMITTING DIODE LASER

摘要

A front-surface emitting, vertical cavity laser and its method of making in which a vertical laser cavity with Bragg reflectors(36,50,52) and an active layer(18), preferably formed by a quantum well, is formed on a substrate(48). Lateral current confinement is achieved by implanting a conductivity-reducing ion into the region(28) surrounding the quantum well. Electrical contact(44) to the upper side of the active layer is achieved by implanting a conductivity-increasing ion into the region(32) surrounding the cavity between the active layer(18) and the upper reflector(36). By such an electrical contact, the upper reflector(36) can advantageously be composed of dielectric layers(38,40). Light is then emitted through the upper reflector(36).