Cryopump method and apparatus

摘要

Cryopump apparatus and method for controlling the operating temperature of a cryoarray in a cryopump. The cryopump has means for thermally isolating one of more of the cryoarrays from the refrigeration source. The means for thermally isolating is a thermal switch formed from at least first and second switch elements made of materials having dissimilar coefficients of thermal expansion. The thermal switch is also used in isolating one of the pump's cryoarrays during a partial regeneration process. The thermal switch of the preferred embodiment may also be used to prevent one of the pump's cryoarrays from falling below a predetermined operating temperature.