发明名称 |
Protection means for ridge waveguide laser structures using thick organic films |
摘要 |
What is disclosed is a semiconductor ridge waveguide laser structure having mechanical protection of ridge element by means of a thick, multi-layer organic material. The organic material, which may be a polyimide film, is deposited over the ridge element. The present invention also provides a fabrication process for depositing the protective means on the ridge element including deposition and photolithographic steps.
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申请公布号 |
US5307357(A) |
申请公布日期 |
1994.04.26 |
申请号 |
US19920972041 |
申请日期 |
1992.11.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JOST, MARK E.;KWONG, RANEE W.;BEHFAR-RAD, ABBAS;KWAN, PETER P. |
分类号 |
H01S5/02;H01S5/22;(IPC1-7):H01S3/30 |
主分类号 |
H01S5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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