发明名称 MTHOD OF FABRICATING A CONTACT IMAGE SENSOR
摘要 The manufacturing method includes the steps of; growing a lower electrode, amorphous silicone, a transparent electrode, an insulating layer on a glass, growing photoresist on the insulating layer, through hole patterning said photoresist to form electrode, baking and etching to remove transformed photoresist to expose the sloped insulating layer and depositing upper electrode on the exposed portion, thereby preventing peeling.
申请公布号 KR940003600(B1) 申请公布日期 1994.04.25
申请号 KR19910013319 申请日期 1991.08.01
申请人 GOLDSTAR CO., LTD. 发明人 SONG, KANG - HYON
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
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