发明名称 CLEAVAGE DEVICE FOR STRIPE WORK
摘要 <p>PURPOSE:To perform cleavage and inspection automatically and speedily by providing a means for detecting a defect of a chip by recognizing the image of the chip and a means for taking out good chips and then aligning them on a chip tray. CONSTITUTION:The title device is provided with a transfer unit for taking out the stripe work on a work tray 45 and then carrying it to a specific position and at the same time for aligning the chips which are cleaved from the work onto a chip tray 46. Then, it is also provided with a cutting unit 16 for cleaving the work by applying it to the work while positioning the work and at the same time swinging a cutter and an image recognition unit 17 for reading the images of the chips. Further, it is provided with a tray guide unit 18 for moving the work tray 45 to an exchange position and a transport position and at the same time switching a plurality of chip trays 46, thus automating cleavage operation easily.</p>
申请公布号 JPH06112313(A) 申请公布日期 1994.04.22
申请号 JP19920256782 申请日期 1992.09.25
申请人 TOSHIBA CORP 发明人 KISHI TSUGIO;SASAKI TSUTOMU;MURAYAMA KIHEI
分类号 H01L21/66;H01L21/301;H01L21/78;H01S5/00;(IPC1-7):H01L21/78;H01S3/18 主分类号 H01L21/66
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