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发明名称
SEMICONDUCTOR MEASUREMENT DEVICE WITH PROBE CARD
摘要
申请公布号
JPH06109764(A)
申请公布日期
1994.04.22
申请号
JP19920283628
申请日期
1992.09.30
申请人
SONY CORP
发明人
YAMAGISHI HIROAKI
分类号
G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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