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发明名称
EXHAUST PIPE OF SINGLE WAFER VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH06112140(A)
申请公布日期
1994.04.22
申请号
JP19920277684
申请日期
1992.09.24
申请人
KOMATSU DENSHI KINZOKU KK;KOMATSU LTD
发明人
MARUTANI SHINJI;KATO HIROKI;HINO KAZUHIKO;HISANAGA NAOTO
分类号
C30B25/14;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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