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发明名称
BONDING HEAD
摘要
申请公布号
JPH06112238(A)
申请公布日期
1994.04.22
申请号
JP19920261254
申请日期
1992.09.30
申请人
NICHIDEN MACH LTD
发明人
WATANABE HIDEAKI
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
代理机构
代理人
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地址
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