DILUTED AMMONIA AQUEOUS HYDROGEN PEROXIDE CLEANING SOLUTION,申请号JP19920261270-传众专利搜索

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发明名称	DILUTED AMMONIA AQUEOUS HYDROGEN PEROXIDE CLEANING SOLUTION
摘要
申请公布号	JPH06112179(A)	申请公布日期	1994.04.22
申请号	JP19920261270	申请日期	1992.09.30
申请人	SONY CORP	发明人	KOKUBU KATSUNORI
分类号	C11D7/18;C11D3/39;H01L21/304;(IPC1-7):H01L21/304	主分类号	C11D7/18
代理机构		代理人
主权项
地址

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