发明名称 |
MANUFACTURING METHOD OF LIGHT EMITTING ARRAY |
摘要 |
The manufacturing method comprises the steps of; growing a first crystal layer by LPE (liquid phase epitaxy) method and etching a portion of dielectric layer by chemicalvapor deposition or sputtering method; melting said first crystal layer by LPE method; re-growing a second crystal layer; and depositing metal on said second crystal layer and under said substrate to form electrodes. The advantage increase light output and solving difficulty in photolithography process of mesa structure. |
申请公布号 |
KR940003438(B1) |
申请公布日期 |
1994.04.22 |
申请号 |
KR19910015470 |
申请日期 |
1991.09.04 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, DUK - HUI |
分类号 |
H01L33/00;(IPC1-7):H01L33/00 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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