Polieren von Wafern in einem Flüssigkeitsbad.,申请号DE19896009168T-传众专利搜索

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发明名称	Polieren von Wafern in einem Flüssigkeitsbad.
摘要
申请公布号	DE68909168(T2)	申请公布日期	1994.04.21
申请号	DE19896009168T	申请日期	1989.10.21
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	COTE, WILLIAM J., ESSEX JUNCTION VERMONT 05452, US;LEACH, MICHAEL A., BRISTOL VERMONT 05443, US
分类号	B24B37/04;B24B49/16;H01L21/304;H01L21/3105;(IPC1-7):B24B37/04;H01L21/00	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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