Interferometrische Einrichtung zur Messung der Lage eines reflektierenden Objektes,申请号DE19934335036-传众专利搜索

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发明名称	Interferometrische Einrichtung zur Messung der Lage eines reflektierenden Objektes
摘要
申请公布号	DE4335036(A1)	申请公布日期	1994.04.21
申请号	DE19934335036	申请日期	1993.10.14
申请人	TABARELLI, WERNER, DR., SCHAAN, LI	发明人	TELLE, HARALD, DR., 38124 BRAUNSCHWEIG, DE
分类号	G01B9/02;(IPC1-7):G01B9/02;G01B11/02;H01S3/103	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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